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1 Comment
Quantum chemistry model of surface reactions and kinetic model of diamond growth: Effects of CH3 radicals and C2H2 molecules at low-temperatures CVD – Nov 2024
https://www.sciencedirect.com/science/article/abs/pii/S0925963524007908?via%3Dihub
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Abstract
> The objective of this study is to explore conditions that facilitate a significant reduction in substrate temperature during diamond growth.
> The typical temperature for this process is around 1200 K; we aim to reduce it to a much lower level.
> To achieve this, we need to understand processes that limit the diamond growth at low temperatures.
> Therefore, we developed a detailed chemical kinetic model to analyze diamond growth on the (100) surface.
> This model accounts for variations in substrate temperature and gas composition.
> Using an ab initio quantum chemistry, we calculated the reaction rates of all major gas phase reactants with the diamond surface, totaling 91 elemental surface reactions.
> Based on this comprehensive model, we developed a reduced model consisting of 8 reactions.
> This reduction enabled us to derive an analytical equation that describes the rate of diamond growth across a broad range of temperatures involving CH3, H, H2, and C2H2 reactants.
> Consistent with previous studies, the model identifies that CH3 is a major precursor of diamond growth, and the contribution from C2H2 to the growth is significantly smaller.
> However, C2H2 can also contribute to forming a sp2-phase instead of a sp3-phase, and this process becomes dominant below a critical temperature.
> As a result, C2H2 flux inhibits diamond growth at low temperatures.
> To quantify this deleterious process, we developed a new mechanism for sp2-phase nucleation on the (100) surface.
> Similar to the so-called HACA mechanism for soot formation it involves hydrogen abstraction and C2H2 addition.
> Consequently, optimal low-temperature CVD growth could be realized in a reactor designed to maximize the CH3 radical production, while minimizing the generation of C2H2 and other sp. and sp2 hydrocarbons.